R&D
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Česko-Japonský R&D project: ALD reaktor pro Minimal Fab
SVCS Process Innovation and HORIBA STEC will cooperate in the development of Minimal Fab design of the Plasma Enhanced Atomic...pokračovat
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Plazmou aktivovaný ALD systém s unikátním zdrojem plazmy nízké teploty
SVCS Process Innovation and ISAC research teams will design together a plasma based ALD and ALEt equipment. The research will start with the standard ALD reactor design produced by ISAC, and plasma generation systems, gas and precursor distribution and controlling skills will be provided by SVCS.
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Vysokoteplotní MOCVD reaktor pro tenkovrstvé pokrývání oxidu kovu a nitridu kovu na substráty do 150mm
Within national R&D project we developed (with the technical support of University of Technology and CEITEC) this unique reactor including...pokračovat
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