Vertical Furnaces
Tabletop Furnaces
Single Wafer Reactors
We are a manufacturer of Front-end Semiconductor equipment from the Heart of Europe
SVCS Process Innovation designs and manufactures Horizontal/Vertical Furnaces for the Semiconductor and Photovoltaic industry. The furnaces are outstanding quality because of selected components, long term experience of our engineers, and competitive prices.
This project is co-financed from the state budget by the Technology agency of the Czech Republic under the Delta a Trend Progamme.
High-temperature device for dopant activation in semiconductor SiC substrates.
Minimal Fab design of atomic layer deposition system.
Research and development of a new plasma-activated ALD deposition system with a unique source of low-temperature plasma based on microwave surfatron and EWCR discharge.
