SVCS brings many year experience with quality inherent in semiconductor industry to solar cell production. SV SOL family of equipment includes horizontal batch diffusion furnace for phosphorus or boron doping/diffusion, PECVD or LPCVD horizontal batch furnace for antireflective coating and passivation, ultra high purity gas and liquid delivery systems for both full production and R&D/pilot environments.
Wafer size: (pseudo)square standard 125 mm, 156 mm and 210 mm (or any customer specific size)
| Diffusion | PECVD | Wet Oxide | Dry Oxide | |
| Wafer load / tube (pcs) | 400 | 200+ | 200+ | 200+ |
| Average cycle time (min) | 60 | 40 | process dependent | process dependent |
| Uniformity (minimum guaranteed) | ||||
| On wafer (%) | 3 | 5 | process dependent | process dependent |
| Wafer/Wafer (%) | 4 | 5 | process dependent | process dependent |
| Run/Run (%) | 3 | 4 | 3 | 3 |
| Sheet resistance (Ω/) | 40-160 | not applicable | not applicable | not applicable |
| Layer thickness (nm) | not applicable | 70-80 | 10…100 | 10…100 |
| Growth rate, (nm/min) | not applicable | 4 | 1…2 | 0,05…0,1 |
Options:
Wafer Handling Automation (Wafer Transfer System, Boat Elevator, Stocker, etc.)
Gas cabinets and Valve Manifold Boxes
| Process gases | SiH4, NH3, B2H6, PH3, SiH2Cl2, H2, Ar, O2, N2O, N2, etc. |
| Delivery rate | from units to thousands of slm, continuous, uninterrupted gas supply by automatic alternating changeover to replenished source vessel |
Temperature controller
| Heating/Cooling performance | +50/-20 °C relative to ambient temperature |
| Temperature control stability | 0.1 °C |
| Time to stabilize | maximum 2 hours |
More detailed specifications available in specific data sheets and through representative and factory contacts.
Singapore
Singapore
Sam Chan
Regional Business Network Pte Ltd
16 New Industrial Road
#04-08 Hudson Technocentre
Singapore 536204
Tel: (65) 62809650
Fax: (65) 62809675
Mobile: (65) 96170912
Web: www.rbnpl.com
Germany
Germany
European Market Partner BV
Park Reeburg 27
5261 GC Vught
The Netherlands
Tel: +31 495 54 58 17
Cell: +31 6 24 759685
Email:
Netherlands
Netherlands
European Market Partner BV
Park Reeburg 27
5261 GC Vught
The Netherlands
Tel: +31 495 54 58 17
Cell: +31 6 24 759685
Email:
France
France
Bruno MERCIER – Business Partner
Self entrepreneur
Expert in Microelectronics, MEMS and Clean room environment
Tel : + 33 6 62 47 30 42
Email:
172 Rue des Bauges
74210 Doussard
FRANCE
Hong Kong + Taiwan
Hong Kong + Taiwan
Great Domain
Mark Chang
Enterprise Co., Ltd.
15-1F, No.37, Sec. 2, Sanmin Rd.,
Banqiao Dist., New Taipei City, Taiwan
Tel.: 0912-730-586
Fax: 0289538399
Email:
Vietnam
Vietnam
AMST., CO. Ltd.
Mrs. Le Thi Thu Huong
48A, Alley 21 Phan Dinh Giot Str.
Thanh Xuan Dist., Hanoi
Vietnam
Tel: +84 2466831909
Mobile: +84902245626
Email: info@amst.com.vn / sales@amst.com.vn
Web: www.amst.com.vn
Australia
Australia
UHP Australia Ply Ltd.
Unit 4, 20 Velediclion Road, Kings
Park NSW 2148, AUSTRALIA
Tel.: +61 (0)2 9676 6769
Mob.: +61 (0) 3904 3893
Email:
Japan
Japan
VYTEK Ltd.
Mr. Vladimir Kovacik
Wisteria Komae bldg.3F
1-2-8 Izumi Honcho, Komae, Tokyo, 201-0003 Japan
Tel.:+81-3-3480-9082
Fax:+81-3-3480-9083
Email:
http://www.vytek.co.jp/
Korea
Korea
Sang-Hoon, Lee (Mr. Edward Lee)
Managing Director of SH Korea
#310-213, Ansan Distribution Complex
994-6, Wongok-dong, Danwon-gu,
Ansan-si, Gyeonggi-do, Korea.
zip code 15431
Fax: +82.31.8084.4744
web-site: www.shkorea.kr
Mobile: 82-10-4307-8412
Email:
Taiwan
Taiwan
Sung Yuan Biotechnology Co., Ltd.
Mr. Thomas Liu
Sales Director
No.818, Wen-San Road, Up-Mountain village
Chung-Lin Hsiang, Hsin-Chu County 307,
Taiwan R.O.C
Tel: +886-3-5122.096 ext 101
Fax: +886-3-5925.308
Mobile: +886-938-365.326
Email:
Email:
China
China
PELAS
Mr. Tony Wang
Shanghai PelaStar Materials Technology Co., Ltd
Room. 1102, Suncome Liauw’s Plaza, No. 738, Shangcheng Rd.Shanghai, 200120, China
Tel.: 86-21-51981110
Fax.: 86-21-51981109
Mobile: 13816658585
Email:
Malaysia
Malaysia
SERMAX Engineering Pte Ltd (201025665Z)
11 Mandai Estate, #08-01 Eldix, Singapore 729908
Phone : +65-6710 7710
Fax : +65-6710 7710
Email:
India
India
MCube Technologies Pvt Ltd.
204, Ashok Sankul II, Ashok Nagar,
Off Range Hills Road, Shivajinagar, Pune- 411007
Contact: Mr Akshay Patil
Mob: +91 (0) 9763 7180 58
Office: +91 (0) 2025 5606 66 (Sales)
Email:
Email:
www.mcubetechnologies.com
Russia
Russia
OOO “SVCS”
Mr. Igor Berezenko
Director
Solnechnaya alley, bld. 6, office 223
Zelenograd, 124498 Moscow
Russia
Phone: +7 495 790 63 31
Email:
https://www.svcs.com
Turkey
Turkey
TESTONE TEKNOLOJI COZUMLERI SAN. VE TIC LTD. STI.
Gürsel Mah. İkbal Sok TestOne Binası No :7
Kağıthane-İstanbul
Tel: 0212 251 24 25
Fax: 0212 222 90 90
Email:
USA
USA
SVCS CO.
1819 Main Street
Sarasota • Florida 34236 • USA
www.svcs.com
Email:
