Vertical Furnaces

Production | R&D

Configurable for Production or R&D Applications

SVCS Vertical Thermal Reactor (VTR) is designed for all standard atmospheric and low pressure CVD processes. VTR is available with several lengths of flat zone for both mass production and R&D application. The single tube set-up with dual boat logistics is optimized for minimum down time as well as low maintenance costs.

Features and Benefits

Automatic wafer handling system for loading wafers from SMIF or FOUP closed pods
Special automatic loading system which allows loading wafers from open cassettes and provides an exceptionally small footprint
Quartz or SiC boats can be used
Highly tailored state of the art modular control system, in house designed and manufactured
10,4“ high-res touchscreen for operator interface

Atmospheric Processes

Diffusion (drive-in) high temperature procesess
Doping from solid, liquid and gaseous dopant sources e.g.: BBr₃, B₂H₆, POCL₃, PH₃, BN
Various thermal processing e.g. annealing, sintering
Pyrogenic Wet Oxide with External Burning System
Dry Oxide

LPCVD Processes

Silicon nitride / low stress nitride
Low temperature oxide (LTO)
High temperature oxide (HTO)
TEOS oxide
Polysilicon, with tilt/flat temperature profile
Doped polysilicon
Oxynitride

DCE or HCl optional for all processes

Technical Data

Wafer size (mm)	100, 150, 200, 300 or any custom size
Wafer load	25 – 150 wafers/batch
Heating system	3 or 5 zones
Flat zone	up to 600 mm (24″)
Process temperature	200 ^oC – 1230 ^oC, ± 0.5 ^oC across flat zone
Power consumption	22kW – 30kW
Power supply (adapted to power grid of destination country)	3-phase, 400 or 480VAC, 40 – 100 A, 50 or 60 Hz
Clean dry air	70 – 110 psig (4,8 to 7,6 bar)
Cooling water	10 – 15 LPM
Exhaust	170 m³/h

Automatic Wafer Handling System

Download

Vertical Furnaces Production | R&D (pdf) Brochure sheet

Contact our local representative for more information

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Singapore
Singapore
Sam Chan
Regional Business Network Pte Ltd
16 New Industrial Road
#04-08 Hudson Technocentre
Singapore 536204

Tel: (65) 62809650
Fax: (65) 62809675
Mobile: (65) 96170912

Web: www.rbnpl.com
Germany
Germany
European Market Partner BV
Park Reeburg 27
5261 GC Vught
The Netherlands

Tel: +31 495 54 58 17
Cell: +31 6 24 759685
Email:
Netherlands
Netherlands
European Market Partner BV
Park Reeburg 27
5261 GC Vught
The Netherlands

Tel: +31 495 54 58 17
Cell: +31 6 24 759685
Email:
France
France
Bruno MERCIER – Business Partner
Self entrepreneur
Expert in Microelectronics, MEMS and Clean room environment
Tel : + 33 6 62 47 30 42
Email:

172 Rue des Bauges

74210 Doussard

FRANCE
Hong Kong + Taiwan
Hong Kong + Taiwan
Great Domain
Mark Chang
Enterprise Co., Ltd.
15-1F, No.37, Sec. 2, Sanmin Rd.,
Banqiao Dist., New Taipei City, Taiwan
Tel.: 0912-730-586
Fax: 0289538399
Email:
Vietnam
Vietnam

AMST., CO. Ltd.
Mrs. Le Thi Thu Huong
48A, Alley 21 Phan Dinh Giot Str.
Thanh Xuan Dist., Hanoi
Vietnam
Tel: +84 2466831909

Mobile: +84902245626
Email: info@amst.com.vn / sales@amst.com.vn

Web: www.amst.com.vn
Australia
Australia
UHP Australia Ply Ltd.
Unit 4, 20 Velediclion Road, Kings
Park NSW 2148, AUSTRALIA
Tel.: +61 (0)2 9676 6769
Mob.: +61 (0) 3904 3893
Email:
Japan
Japan
VYTEK Ltd.
Mr. Vladimir Kovacik
Wisteria Komae bldg.3F
1-2-8 Izumi Honcho, Komae, Tokyo, 201-0003 Japan
Tel.:+81-3-3480-9082
Fax:+81-3-3480-9083
Email:
http://www.vytek.co.jp/
Korea
Korea
Sang-Hoon, Lee (Mr. Edward Lee)
Managing Director of SH Korea
#310-213, Ansan Distribution Complex
994-6, Wongok-dong, Danwon-gu,
Ansan-si, Gyeonggi-do, Korea.
zip code 15431
Fax: +82.31.8084.4744
web-site: www.shkorea.kr
Mobile: 82-10-4307-8412
Email:
Taiwan
Taiwan
Sung Yuan Biotechnology Co., Ltd.
Mr. Thomas Liu
Sales Director
No.818, Wen-San Road, Up-Mountain village
Chung-Lin Hsiang, Hsin-Chu County 307,
Taiwan R.O.C
Tel: +886-3-5122.096 ext 101
Fax: +886-3-5925.308
Mobile: +886-938-365.326
Email:
Email:
China
China
PELAS
Mr. Tony Wang
Shanghai PelaStar Materials Technology Co., Ltd
Room. 1102, Suncome Liauw’s Plaza, No. 738, Shangcheng Rd.Shanghai, 200120, China
Tel.: 86-21-51981110
Fax.: 86-21-51981109
Mobile: 13816658585
Email:
Malaysia
Malaysia
SERMAX Engineering Pte Ltd (201025665Z)
11 Mandai Estate, #08-01 Eldix, Singapore 729908
Phone : +65-6710 7710
Fax : +65-6710 7710
Email:
India
India
MCube Technologies Pvt Ltd.
204, Ashok Sankul II, Ashok Nagar,
Off Range Hills Road, Shivajinagar, Pune- 411007

Contact: Mr Akshay Patil
Mob: +91 (0) 9763 7180 58

Office: +91 (0) 2025 5606 66 (Sales)

Email:
Email:
www.mcubetechnologies.com
Russia
Russia
OOO “SVCS”
Mr. Igor Berezenko
Director
Solnechnaya alley, bld. 6, office 223
Zelenograd, 124498 Moscow
Russia
Phone: +7 495 790 63 31
Email:
https://www.svcs.com
Turkey
Turkey
TESTONE TEKNOLOJI COZUMLERI SAN. VE TIC LTD. STI.
Gürsel Mah. İkbal Sok TestOne Binası No :7
Kağıthane-İstanbul
Tel: 0212 251 24 25
Fax: 0212 222 90 90
Email:
USA
USA
SVCS CO.
1819 Main Street
Sarasota • Florida 34236 • USA
www.svcs.com
Email: